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Surface Conformal Imprint Lithography (SCIL) unit Model :MA6/BA6/SCIL

Request for testing

Operator Name :Dr. Nabin Ch mondal

Operator Email :nabinch72@gmail.com

The surface conformal imprint lithography (SCIL) system allows for sub-100nm imprinting of features. Using a hard master, a soft replica stamp is made using PDMS and flexible glass sheet. The result is a flexible stamp that readily conforms to existing substrate topography when imprinting atop a UV curable nano-imprint resist.